Vertical Stage
Accuracy
- (5)
Category
- (5)
Stroke [mm]
- (2)
- (2)
- (1)
Guiding Mechanism
- (5)
Axis
- (5)
max. Speed [mm/s]
- (2)
- (3)
Table Size [mm]
- (1)
- (1)
- (1)
- (2)
Positioning Precision
- (3)
- (2)
Material
- (4)
- (1)
Pitch [mm]
- (5)
Parallelism [µm]
- (1)
- (2)
- (2)
Dynamic Parallelism [µm]
- (2)
- (1)
- (2)
Type
- (5)